Design, fabrication, and characterization of polymer-based cantilever probes for atomic force microscopes
نویسندگان
چکیده
منابع مشابه
Design, fabrication, and characterization of surface micromachined MEMS cantilever components
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Atomic force microscopy is a powerful characterization tool for polymer science, capable of revealing surface structures with superior spatial resolution [1]. The universal character of repulsive forces between the tip and the sample, which are employed for surface analysis in AFM, enables examination of even single polymer molecules without disturbance of their integrity [2]. Being initially d...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2016
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4960726